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PRODUCTS
  • FM4910 compliant wet benches (robotic and manual).
  • Chemical blending and spiking systems.
  • Fume hoods (plastic and stainless steel).
  • Quartz tube cleaning systems (horizontal and vertical).
  • Quartz tube storage systems.
  • Chemical transport carts.
WHAT'S NEW?
Over the last 30 years, customization, innovation and satisfied customers has been the key to SPEC’s success. Another key to their success over the years is because they build exactly what the customer wants and not a “canned” catalog solution. The three types of robotics SPEC offers allows them to provide different automation schemes to fit specific requirements and budgets. Cassette less automation has become a standard option for 200mm and 300mm wafers. End effectors can be configured for 25 or 50 wafers.

SPEC recently moved into their new 45,000 square foot manufacturing facility that includes a 5,200 square foot, Class 1000 cleanroom for final test and assembly, and an 800 square foot, Class 10 development lab.
For additional information, visit their web site at: www.team-spec.com