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PRODUCTS

Non-contact heavy metal and crystal defect monitoring systems:

  • Minority carrier lifetime measurement tools for detecting heavy metals and crystalline defects (µ-PCD, SPV) with specific options to measure Fe, Cu, and Cr
  • Oxide quality characterization and plasma damage monitoring (Kelvin probe, corona charge)
  • Resistivity, thickness, and type test instruments for wafers, ingots, and blocks
  • Tools to monitor ion implant dose via sheet resistance
  • LBIC (Light Beam Induced Current), reflectance, and emitter resistance for the PV industry
  • In-line production metrology tools for PV industry
  • BMD (Bulk Micro Defect) and SIRM (Scanning InfraRed Microscope) tools to analyze wafer quality
  • DLTS (Deep Level Transient Spectroscopy) tools
  • Hand-held, battery operated PN tester
WHAT'S NEW?
Semilab is a leading supplier of state-of-the-art metrology systems for the semiconductor and photovoltaic industry as well as for scientific investigation. The Model WT-2000 is a multi-purpose tool for non-destructive, non-contact high resolution measurement techniques for monitoring carrier lifetime and diffusion length in single and multi-crystalline silicon wafers up to 400mm in diameter and Si blocks.

In early 2005 Semilab purchased Semitest and added their Epimet equipment to the list of products offered. The also opened their US headquarters in Billerica, MA. All US service will be handled from this office.
For additional information, visit their web site at: www.semilab.com