Non-contact heavy
metal and crystal defect monitoring systems:
- Minority carrier lifetime measurement tools for detecting heavy
metals and crystalline defects (µ-PCD, SPV) with specific
options to measure Fe, Cu, and Cr
- Oxide quality characterization and plasma damage monitoring
(Kelvin probe, corona charge)
- Resistivity, thickness, and type test instruments for wafers,
ingots, and blocks
- Tools to monitor ion implant dose via sheet resistance
- LBIC (Light Beam Induced Current), reflectance, and emitter
resistance for the PV industry
- In-line production metrology tools for PV industry
- BMD (Bulk Micro Defect) and SIRM (Scanning InfraRed Microscope)
tools to analyze wafer quality
- DLTS (Deep Level Transient Spectroscopy) tools
- Hand-held, battery operated PN tester
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