Willig and Associates

PRODUCTS

CO₂ Fire Suppression Systems for wet benches and other semiconductor equipment.
Multi-spectral IR fire detection systems.
Turn-key fire protection systems.

WHAT'S NEW?

Mark Systems, Inc. is the worldwide leader for Integrated Fire detection, controls and suppression systems for facility and fab related equipment (wet benches, process tools, chemical cabinets, etc.). Mark systems is the only fire protection company with this experience that is represented on the EH&S SEMI task force for fire protection.

Wet benches and other process tools were typically made from white, stress relieved polypropylene. Unfortunately, this material ignites and burns very rapidly relieving quantities of contaminates and toxic gases. Mark Systems offers a video (also available in CD) produced at Sandia National Laboratories in New Mexico which clearly depicts the fire and facility risks associated with this hazard. A fire was started using a cardboard box (12” x 12” x 12”) in the plenum area of a 10’ open front wet bench with a single match. The fire rapidly grew in intensity to a point beyond the capability of a portable fire extinguisher within 1-2 minutes releasing considerable heat, smoke and toxic by-products. The entire bench was fully involved in fire within 3-4 minutes and ultimately turned into a molten puddle of liquid polypro within 20 minutes leaving only some small electrical components.

In an effort to manage and reduce this potentially dangerous risk, the industry developed flame-retardant polypro (FRPP). This product proved to slightly delay the ignition point, gut unfortunately, shoes heat, smoke and toxic characteristics similar to the basic polypro and the additives contained within the FRPP were also found to be detrimental to the processes. FM Global (FM) has developed a test standard (FM4910) to aggressively test and accept new “fire safe” materials for wet benches which greatly minimizes the risk of fire and smoke releases for these materials. FM maintains a list of FM4910 approved materials which have successfully passed the prescribed testing are now used for new wet bench construction. The acceptance of these new materials is a significant step in reducing the inherent risk within semiconductor facilities, however, id did nothing for the hundreds of existing wet benches in the industry.

Mark Systems offers innovative solutions for these complex hazards using tested and proven design concepts. Mark Systems utilizes intelligent multi-spectral infrared (IR) optical detection to rapidly detect a fire within these combustible tools and discharge “clean agent” carbon dioxide (CO2) to quickly suppress the fire. Mark Systems uses CO2 that has been tested to 99.8% pure according to ASSAY purity test standards and offers Teflon® coated type 316 stainless steel tubing, fittings and nozzles in installations where chemical attack is a concern. To reduce cost and space utilized within the cleanroom for the fire system equipment, Mark Systems has developed a centralized design concept allowing one supply of CO2 agent and one control panel to simultaneously protect multiple wet benches or process tools within a facility.

Insurance companies, local fire officials and other Authorities Having Jurisdiction (AHJ) are becoming increasing interested in this potential fire hazard issue and are now mandating protection at some facilities worldwide. In Oregon and southwest Washington they are becoming very strict in evaluating and insuring fabs including product losses.

For additional information, visit their web site at: www.marksystems.com